4/10/2012	10:01:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	10:01:32 AM	Recipe started at 10:01 AM
4/10/2012	10:01:32 AM	Helium valve closed
4/10/2012	10:01:32 AM	H2 valve closed
4/10/2012	10:01:32 AM	BCl3 valve closed
4/10/2012	10:01:32 AM	PH3 valve closed
4/10/2012	10:01:32 AM	SiCl4 pre valve closed
4/10/2012	10:01:32 AM	SiCl4 post valve closed
4/10/2012	10:01:32 AM	Main Vac valve closed
4/10/2012	10:01:32 AM	Bypass valve closed
4/10/2012	10:01:32 AM	Bubbler valve closed
4/10/2012	10:01:32 AM	Helium MFC set to  0.000000
4/10/2012	10:01:32 AM	H2 MFC set to  0.000000
4/10/2012	10:01:32 AM	BCl3 MFC set to  0.000000
4/10/2012	10:01:32 AM	PH3 MFC set to  0.000000
4/10/2012	10:01:32 AM	SiCl4 MFC set to  0.000000
4/10/2012	10:01:32 AM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:01:32 AM	Tube furnace set to 0
4/10/2012	10:01:35 AM	H2 valve closed
4/10/2012	10:01:35 AM	BCl3 valve closed
4/10/2012	10:01:35 AM	PH3 valve closed
4/10/2012	10:01:35 AM	SiCl4 pre valve closed
4/10/2012	10:01:35 AM	SiCl4 post valve closed
4/10/2012	10:01:35 AM	Main Vac valve closed
4/10/2012	10:01:35 AM	Bypass valve closed
4/10/2012	10:01:35 AM	Bubbler valve closed
4/10/2012	10:01:35 AM	Helium valve opened
4/10/2012	10:01:35 AM	Helium MFC set to  500.000000
4/10/2012	10:01:35 AM	H2 MFC set to  0.000000
4/10/2012	10:01:35 AM	BCl3 MFC set to  0.000000
4/10/2012	10:01:35 AM	PH3 MFC set to  0.000000
4/10/2012	10:01:35 AM	SiCl4 MFC set to  0.000000
4/10/2012	10:01:35 AM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:01:36 AM	Tube furnace set to 0
4/10/2012	10:02:40 AM	Helium valve closed
4/10/2012	10:02:40 AM	H2 valve closed
4/10/2012	10:02:40 AM	BCl3 valve closed
4/10/2012	10:02:40 AM	PH3 valve closed
4/10/2012	10:02:40 AM	SiCl4 pre valve closed
4/10/2012	10:02:40 AM	SiCl4 post valve closed
4/10/2012	10:02:40 AM	Main Vac valve closed
4/10/2012	10:02:40 AM	Bypass valve closed
4/10/2012	10:02:40 AM	Bubbler valve closed
4/10/2012	10:02:40 AM	Helium MFC set to  0.000000
4/10/2012	10:02:40 AM	H2 MFC set to  0.000000
4/10/2012	10:02:40 AM	BCl3 MFC set to  0.000000
4/10/2012	10:02:40 AM	PH3 MFC set to  0.000000
4/10/2012	10:02:40 AM	SiCl4 MFC set to  0.000000
4/10/2012	10:02:40 AM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:02:41 AM	Tube furnace set to 0
4/10/2012	10:02:42 AM	Run finished at 10:02 AM
4/10/2012	10:02:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	10:09:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/10/2012	10:09:15 AM	Recipe started at 10:09 AM
4/10/2012	10:09:15 AM	Helium valve closed
4/10/2012	10:09:15 AM	H2 valve closed
4/10/2012	10:09:15 AM	BCl3 valve closed
4/10/2012	10:09:15 AM	PH3 valve closed
4/10/2012	10:09:15 AM	SiCl4 pre valve closed
4/10/2012	10:09:15 AM	SiCl4 post valve closed
4/10/2012	10:09:15 AM	Main Vac valve closed
4/10/2012	10:09:15 AM	Bubbler valve closed
4/10/2012	10:09:15 AM	Bypass valve opened
4/10/2012	10:09:15 AM	Helium MFC set to  0.000000
4/10/2012	10:09:15 AM	H2 MFC set to  0.000000
4/10/2012	10:09:15 AM	BCl3 MFC set to  0.000000
4/10/2012	10:09:15 AM	PH3 MFC set to  0.000000
4/10/2012	10:09:15 AM	SiCl4 MFC set to  0.000000
4/10/2012	10:09:16 AM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:09:16 AM	Tube furnace set to 0
4/10/2012	10:10:13 AM	Helium valve closed
4/10/2012	10:10:13 AM	H2 valve closed
4/10/2012	10:10:13 AM	BCl3 valve closed
4/10/2012	10:10:13 AM	PH3 valve closed
4/10/2012	10:10:13 AM	SiCl4 pre valve closed
4/10/2012	10:10:13 AM	SiCl4 post valve closed
4/10/2012	10:10:13 AM	Main Vac valve closed
4/10/2012	10:10:13 AM	Bubbler valve closed
4/10/2012	10:10:13 AM	Bypass valve opened
4/10/2012	10:10:13 AM	Helium MFC set to  0.000000
4/10/2012	10:10:13 AM	H2 MFC set to  0.000000
4/10/2012	10:10:13 AM	BCl3 MFC set to  0.000000
4/10/2012	10:10:13 AM	PH3 MFC set to  0.000000
4/10/2012	10:10:13 AM	SiCl4 MFC set to  0.000000
4/10/2012	10:10:14 AM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:10:14 AM	Tube furnace set to 0
4/10/2012	10:11:14 AM	Helium valve closed
4/10/2012	10:11:14 AM	H2 valve closed
4/10/2012	10:11:14 AM	BCl3 valve closed
4/10/2012	10:11:14 AM	PH3 valve closed
4/10/2012	10:11:14 AM	SiCl4 pre valve closed
4/10/2012	10:11:14 AM	SiCl4 post valve closed
4/10/2012	10:11:14 AM	Bypass valve closed
4/10/2012	10:11:14 AM	Bubbler valve closed
4/10/2012	10:11:14 AM	Main Vac valve opened
4/10/2012	10:11:14 AM	Helium MFC set to  0.000000
4/10/2012	10:11:14 AM	H2 MFC set to  0.000000
4/10/2012	10:11:14 AM	BCl3 MFC set to  0.000000
4/10/2012	10:11:14 AM	PH3 MFC set to  0.000000
4/10/2012	10:11:14 AM	SiCl4 MFC set to  0.000000
4/10/2012	10:11:14 AM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:11:14 AM	Tube furnace set to 0
4/10/2012	10:11:15 AM	Run finished at 10:11 AM
4/10/2012	10:11:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/10/2012	12:11:22 PM	Main Vac valve closed
4/10/2012	12:11:57 PM	Main Vac valve opened
4/10/2012	12:12:49 PM	Recipe started at 12:12 PM
4/10/2012	12:12:49 PM	Helium valve closed
4/10/2012	12:12:49 PM	H2 valve closed
4/10/2012	12:12:49 PM	BCl3 valve closed
4/10/2012	12:12:49 PM	PH3 valve closed
4/10/2012	12:12:49 PM	SiCl4 pre valve closed
4/10/2012	12:12:49 PM	SiCl4 post valve closed
4/10/2012	12:12:49 PM	Bypass valve closed
4/10/2012	12:12:49 PM	Bubbler valve closed
4/10/2012	12:12:49 PM	Main Vac valve opened
4/10/2012	12:12:49 PM	Helium MFC set to  0.000000
4/10/2012	12:12:49 PM	H2 MFC set to  0.000000
4/10/2012	12:12:49 PM	BCl3 MFC set to  0.000000
4/10/2012	12:12:49 PM	PH3 MFC set to  0.000000
4/10/2012	12:12:49 PM	SiCl4 MFC set to  0.000000
4/10/2012	12:12:49 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	12:12:49 PM	Tube furnace set to 0
4/10/2012	12:12:52 PM	Helium valve closed
4/10/2012	12:12:52 PM	H2 valve closed
4/10/2012	12:12:52 PM	BCl3 valve closed
4/10/2012	12:12:52 PM	PH3 valve closed
4/10/2012	12:12:52 PM	SiCl4 pre valve closed
4/10/2012	12:12:52 PM	SiCl4 post valve closed
4/10/2012	12:12:52 PM	Main Vac valve closed
4/10/2012	12:12:52 PM	Bypass valve closed
4/10/2012	12:12:52 PM	Bubbler valve closed
4/10/2012	12:12:52 PM	Helium MFC set to  0.000000
4/10/2012	12:12:52 PM	H2 MFC set to  0.000000
4/10/2012	12:12:52 PM	BCl3 MFC set to  0.000000
4/10/2012	12:12:52 PM	PH3 MFC set to  0.000000
4/10/2012	12:12:52 PM	SiCl4 MFC set to  0.000000
4/10/2012	12:12:52 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	12:12:52 PM	Tube furnace set to 0
4/10/2012	12:12:55 PM	Helium valve closed
4/10/2012	12:12:55 PM	BCl3 valve closed
4/10/2012	12:12:55 PM	PH3 valve closed
4/10/2012	12:12:55 PM	SiCl4 pre valve closed
4/10/2012	12:12:55 PM	SiCl4 post valve closed
4/10/2012	12:12:55 PM	Main Vac valve closed
4/10/2012	12:12:55 PM	Bypass valve closed
4/10/2012	12:12:55 PM	Bubbler valve closed
4/10/2012	12:12:55 PM	H2 valve opened
4/10/2012	12:12:55 PM	Helium MFC set to  0.000000
4/10/2012	12:12:55 PM	H2 MFC set to  500.000000
4/10/2012	12:12:55 PM	BCl3 MFC set to  0.000000
4/10/2012	12:12:55 PM	PH3 MFC set to  0.000000
4/10/2012	12:12:55 PM	SiCl4 MFC set to  0.000000
4/10/2012	12:12:55 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	12:12:56 PM	Tube furnace set to 0
4/10/2012	12:14:04 PM	Helium valve closed
4/10/2012	12:14:04 PM	BCl3 valve closed
4/10/2012	12:14:04 PM	PH3 valve closed
4/10/2012	12:14:04 PM	SiCl4 pre valve closed
4/10/2012	12:14:04 PM	SiCl4 post valve closed
4/10/2012	12:14:04 PM	Main Vac valve closed
4/10/2012	12:14:04 PM	Bypass valve closed
4/10/2012	12:14:04 PM	H2 valve opened
4/10/2012	12:14:04 PM	Bubbler valve opened
4/10/2012	12:14:04 PM	Helium MFC set to  0.000000
4/10/2012	12:14:04 PM	H2 MFC set to  500.000000
4/10/2012	12:14:04 PM	BCl3 MFC set to  0.000000
4/10/2012	12:14:04 PM	PH3 MFC set to  0.000000
4/10/2012	12:14:04 PM	SiCl4 MFC set to  0.000000
4/10/2012	12:14:04 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	12:14:04 PM	Tube furnace set to 0
4/10/2012	12:14:05 PM	Helium valve closed
4/10/2012	12:14:05 PM	BCl3 valve closed
4/10/2012	12:14:05 PM	PH3 valve closed
4/10/2012	12:14:05 PM	SiCl4 pre valve closed
4/10/2012	12:14:05 PM	SiCl4 post valve closed
4/10/2012	12:14:05 PM	Main Vac valve closed
4/10/2012	12:14:05 PM	Bypass valve closed
4/10/2012	12:14:05 PM	H2 valve opened
4/10/2012	12:14:05 PM	Bubbler valve opened
4/10/2012	12:14:05 PM	Helium MFC set to  0.000000
4/10/2012	12:14:05 PM	H2 MFC set to  500.000000
4/10/2012	12:14:05 PM	BCl3 MFC set to  0.000000
4/10/2012	12:14:05 PM	PH3 MFC set to  0.000000
4/10/2012	12:14:05 PM	SiCl4 MFC set to  0.000000
4/10/2012	12:14:05 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	12:14:05 PM	Tube furnace set to 1000
4/10/2012	12:39:05 PM	Helium valve closed
4/10/2012	12:39:05 PM	PH3 valve closed
4/10/2012	12:39:05 PM	Main Vac valve closed
4/10/2012	12:39:05 PM	Bypass valve closed
4/10/2012	12:39:05 PM	H2 valve opened
4/10/2012	12:39:05 PM	BCl3 valve opened
4/10/2012	12:39:05 PM	SiCl4 pre valve opened
4/10/2012	12:39:05 PM	SiCl4 post valve opened
4/10/2012	12:39:05 PM	Bubbler valve opened
4/10/2012	12:39:05 PM	Helium MFC set to  0.000000
4/10/2012	12:39:05 PM	H2 MFC set to  450.000000
4/10/2012	12:39:05 PM	BCl3 MFC set to  1.000000
4/10/2012	12:39:05 PM	PH3 MFC set to  0.000000
4/10/2012	12:39:05 PM	SiCl4 MFC set to  50.000000
4/10/2012	12:39:05 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	12:39:05 PM	Tube furnace set to 1000
4/10/2012	1:00:05 PM	Helium valve closed
4/10/2012	1:00:05 PM	BCl3 valve closed
4/10/2012	1:00:05 PM	PH3 valve closed
4/10/2012	1:00:05 PM	SiCl4 pre valve closed
4/10/2012	1:00:05 PM	SiCl4 post valve closed
4/10/2012	1:00:05 PM	Main Vac valve closed
4/10/2012	1:00:05 PM	Bypass valve closed
4/10/2012	1:00:05 PM	H2 valve opened
4/10/2012	1:00:05 PM	Bubbler valve opened
4/10/2012	1:00:05 PM	Helium MFC set to  0.000000
4/10/2012	1:00:05 PM	H2 MFC set to  500.000000
4/10/2012	1:00:05 PM	BCl3 MFC set to  0.000000
4/10/2012	1:00:05 PM	PH3 MFC set to  0.000000
4/10/2012	1:00:05 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:00:05 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	1:00:05 PM	Tube furnace set to 750
4/10/2012	1:15:05 PM	H2 valve closed
4/10/2012	1:15:05 PM	BCl3 valve closed
4/10/2012	1:15:05 PM	PH3 valve closed
4/10/2012	1:15:05 PM	SiCl4 pre valve closed
4/10/2012	1:15:05 PM	SiCl4 post valve closed
4/10/2012	1:15:05 PM	Main Vac valve closed
4/10/2012	1:15:05 PM	Bypass valve closed
4/10/2012	1:15:05 PM	Helium valve opened
4/10/2012	1:15:05 PM	Bubbler valve opened
4/10/2012	1:15:05 PM	Helium MFC set to  500.000000
4/10/2012	1:15:05 PM	H2 MFC set to  0.000000
4/10/2012	1:15:05 PM	BCl3 MFC set to  0.000000
4/10/2012	1:15:05 PM	PH3 MFC set to  0.000000
4/10/2012	1:15:05 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:15:05 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	1:15:06 PM	Tube furnace set to 0
4/10/2012	1:35:06 PM	Helium valve closed
4/10/2012	1:35:06 PM	H2 valve closed
4/10/2012	1:35:06 PM	BCl3 valve closed
4/10/2012	1:35:06 PM	PH3 valve closed
4/10/2012	1:35:06 PM	SiCl4 pre valve closed
4/10/2012	1:35:06 PM	SiCl4 post valve closed
4/10/2012	1:35:06 PM	Main Vac valve closed
4/10/2012	1:35:06 PM	Bypass valve closed
4/10/2012	1:35:06 PM	Bubbler valve closed
4/10/2012	1:35:06 PM	Helium MFC set to  0.000000
4/10/2012	1:35:06 PM	H2 MFC set to  0.000000
4/10/2012	1:35:06 PM	BCl3 MFC set to  0.000000
4/10/2012	1:35:06 PM	PH3 MFC set to  0.000000
4/10/2012	1:35:06 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:35:06 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	1:35:06 PM	Tube furnace set to 0
4/10/2012	1:43:49 PM	Run aborted at 1:43 PM
4/10/2012	1:43:49 PM	Helium valve closed
4/10/2012	1:43:49 PM	H2 valve closed
4/10/2012	1:43:49 PM	BCl3 valve closed
4/10/2012	1:43:49 PM	PH3 valve closed
4/10/2012	1:43:49 PM	SiCl4 pre valve closed
4/10/2012	1:43:49 PM	SiCl4 post valve closed
4/10/2012	1:43:49 PM	Bypass valve closed
4/10/2012	1:43:49 PM	Main Vac valve closed
4/10/2012	1:43:49 PM	Bubbler valve closed
4/10/2012	1:43:49 PM	Helium MFC set to  0.000000
4/10/2012	1:43:49 PM	H2 MFC set to  0.000000
4/10/2012	1:43:49 PM	BCl3 MFC set to  0.000000
4/10/2012	1:43:49 PM	PH3 MFC set to  0.000000
4/10/2012	1:43:49 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:43:49 PM	Tube furnace set to 0
4/10/2012	1:43:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	1:43:59 PM	Recipe started at 1:43 PM
4/10/2012	1:43:59 PM	Helium valve closed
4/10/2012	1:43:59 PM	H2 valve closed
4/10/2012	1:43:59 PM	BCl3 valve closed
4/10/2012	1:43:59 PM	PH3 valve closed
4/10/2012	1:43:59 PM	SiCl4 pre valve closed
4/10/2012	1:43:59 PM	SiCl4 post valve closed
4/10/2012	1:43:59 PM	Main Vac valve closed
4/10/2012	1:43:59 PM	Bypass valve closed
4/10/2012	1:43:59 PM	Bubbler valve closed
4/10/2012	1:43:59 PM	Helium MFC set to  0.000000
4/10/2012	1:43:59 PM	H2 MFC set to  0.000000
4/10/2012	1:43:59 PM	BCl3 MFC set to  0.000000
4/10/2012	1:43:59 PM	PH3 MFC set to  0.000000
4/10/2012	1:43:59 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:43:59 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	1:43:59 PM	Tube furnace set to 0
4/10/2012	1:44:02 PM	H2 valve closed
4/10/2012	1:44:02 PM	BCl3 valve closed
4/10/2012	1:44:02 PM	PH3 valve closed
4/10/2012	1:44:02 PM	SiCl4 pre valve closed
4/10/2012	1:44:02 PM	SiCl4 post valve closed
4/10/2012	1:44:02 PM	Main Vac valve closed
4/10/2012	1:44:02 PM	Bypass valve closed
4/10/2012	1:44:02 PM	Bubbler valve closed
4/10/2012	1:44:02 PM	Helium valve opened
4/10/2012	1:44:02 PM	Helium MFC set to  500.000000
4/10/2012	1:44:02 PM	H2 MFC set to  0.000000
4/10/2012	1:44:02 PM	BCl3 MFC set to  0.000000
4/10/2012	1:44:02 PM	PH3 MFC set to  0.000000
4/10/2012	1:44:02 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:44:02 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	1:44:02 PM	Tube furnace set to 0
4/10/2012	1:44:07 PM	Helium valve closed
4/10/2012	1:44:07 PM	H2 valve closed
4/10/2012	1:44:07 PM	BCl3 valve closed
4/10/2012	1:44:07 PM	PH3 valve closed
4/10/2012	1:44:07 PM	SiCl4 pre valve closed
4/10/2012	1:44:07 PM	SiCl4 post valve closed
4/10/2012	1:44:07 PM	Main Vac valve closed
4/10/2012	1:44:07 PM	Bypass valve closed
4/10/2012	1:44:07 PM	Bubbler valve closed
4/10/2012	1:44:07 PM	Helium MFC set to  0.000000
4/10/2012	1:44:07 PM	H2 MFC set to  0.000000
4/10/2012	1:44:07 PM	BCl3 MFC set to  0.000000
4/10/2012	1:44:07 PM	PH3 MFC set to  0.000000
4/10/2012	1:44:07 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:44:07 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	1:44:07 PM	Tube furnace set to 0
4/10/2012	1:44:08 PM	Run finished at 1:44 PM
4/10/2012	1:44:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	1:48:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	1:48:06 PM	Recipe started at 1:48 PM
4/10/2012	1:48:06 PM	Helium valve closed
4/10/2012	1:48:06 PM	H2 valve closed
4/10/2012	1:48:06 PM	BCl3 valve closed
4/10/2012	1:48:06 PM	PH3 valve closed
4/10/2012	1:48:06 PM	SiCl4 pre valve closed
4/10/2012	1:48:06 PM	SiCl4 post valve closed
4/10/2012	1:48:06 PM	Main Vac valve closed
4/10/2012	1:48:06 PM	Bypass valve closed
4/10/2012	1:48:06 PM	Bubbler valve closed
4/10/2012	1:48:06 PM	Helium MFC set to  0.000000
4/10/2012	1:48:06 PM	H2 MFC set to  0.000000
4/10/2012	1:48:06 PM	BCl3 MFC set to  0.000000
4/10/2012	1:48:06 PM	PH3 MFC set to  0.000000
4/10/2012	1:48:06 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:48:06 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	1:48:07 PM	Tube furnace set to 0
4/10/2012	1:48:10 PM	H2 valve closed
4/10/2012	1:48:10 PM	BCl3 valve closed
4/10/2012	1:48:10 PM	PH3 valve closed
4/10/2012	1:48:10 PM	SiCl4 pre valve closed
4/10/2012	1:48:10 PM	SiCl4 post valve closed
4/10/2012	1:48:10 PM	Main Vac valve closed
4/10/2012	1:48:10 PM	Bypass valve closed
4/10/2012	1:48:10 PM	Bubbler valve closed
4/10/2012	1:48:10 PM	Helium valve opened
4/10/2012	1:48:10 PM	Helium MFC set to  500.000000
4/10/2012	1:48:10 PM	H2 MFC set to  0.000000
4/10/2012	1:48:10 PM	BCl3 MFC set to  0.000000
4/10/2012	1:48:10 PM	PH3 MFC set to  0.000000
4/10/2012	1:48:10 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:48:10 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	1:48:10 PM	Tube furnace set to 0
4/10/2012	1:48:11 PM	Helium valve closed
4/10/2012	1:48:11 PM	H2 valve closed
4/10/2012	1:48:11 PM	BCl3 valve closed
4/10/2012	1:48:11 PM	PH3 valve closed
4/10/2012	1:48:11 PM	SiCl4 pre valve closed
4/10/2012	1:48:11 PM	SiCl4 post valve closed
4/10/2012	1:48:11 PM	Main Vac valve closed
4/10/2012	1:48:11 PM	Bypass valve closed
4/10/2012	1:48:11 PM	Bubbler valve closed
4/10/2012	1:48:11 PM	Helium MFC set to  0.000000
4/10/2012	1:48:11 PM	H2 MFC set to  0.000000
4/10/2012	1:48:11 PM	BCl3 MFC set to  0.000000
4/10/2012	1:48:11 PM	PH3 MFC set to  0.000000
4/10/2012	1:48:11 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:48:11 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	1:48:11 PM	Tube furnace set to 0
4/10/2012	1:48:12 PM	Run finished at 1:48 PM
4/10/2012	1:48:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	1:52:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/10/2012	1:52:10 PM	Recipe started at 1:52 PM
4/10/2012	1:52:10 PM	Helium valve closed
4/10/2012	1:52:10 PM	H2 valve closed
4/10/2012	1:52:10 PM	BCl3 valve closed
4/10/2012	1:52:10 PM	PH3 valve closed
4/10/2012	1:52:10 PM	SiCl4 pre valve closed
4/10/2012	1:52:10 PM	SiCl4 post valve closed
4/10/2012	1:52:10 PM	Main Vac valve closed
4/10/2012	1:52:10 PM	Bubbler valve closed
4/10/2012	1:52:10 PM	Bypass valve opened
4/10/2012	1:52:10 PM	Helium MFC set to  0.000000
4/10/2012	1:52:10 PM	H2 MFC set to  0.000000
4/10/2012	1:52:10 PM	BCl3 MFC set to  0.000000
4/10/2012	1:52:10 PM	PH3 MFC set to  0.000000
4/10/2012	1:52:10 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:52:10 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	1:52:11 PM	Tube furnace set to 0
4/10/2012	1:53:10 PM	Helium valve closed
4/10/2012	1:53:10 PM	H2 valve closed
4/10/2012	1:53:10 PM	BCl3 valve closed
4/10/2012	1:53:10 PM	PH3 valve closed
4/10/2012	1:53:10 PM	SiCl4 pre valve closed
4/10/2012	1:53:10 PM	SiCl4 post valve closed
4/10/2012	1:53:10 PM	Main Vac valve closed
4/10/2012	1:53:10 PM	Bubbler valve closed
4/10/2012	1:53:10 PM	Bypass valve opened
4/10/2012	1:53:10 PM	Helium MFC set to  0.000000
4/10/2012	1:53:10 PM	H2 MFC set to  0.000000
4/10/2012	1:53:10 PM	BCl3 MFC set to  0.000000
4/10/2012	1:53:10 PM	PH3 MFC set to  0.000000
4/10/2012	1:53:10 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:53:10 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	1:53:10 PM	Tube furnace set to 0
4/10/2012	1:54:10 PM	Helium valve closed
4/10/2012	1:54:10 PM	H2 valve closed
4/10/2012	1:54:10 PM	BCl3 valve closed
4/10/2012	1:54:10 PM	PH3 valve closed
4/10/2012	1:54:10 PM	SiCl4 pre valve closed
4/10/2012	1:54:10 PM	SiCl4 post valve closed
4/10/2012	1:54:10 PM	Bypass valve closed
4/10/2012	1:54:10 PM	Bubbler valve closed
4/10/2012	1:54:10 PM	Main Vac valve opened
4/10/2012	1:54:10 PM	Helium MFC set to  0.000000
4/10/2012	1:54:10 PM	H2 MFC set to  0.000000
4/10/2012	1:54:10 PM	BCl3 MFC set to  0.000000
4/10/2012	1:54:10 PM	PH3 MFC set to  0.000000
4/10/2012	1:54:10 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:54:10 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	1:54:10 PM	Tube furnace set to 0
4/10/2012	1:54:11 PM	Run finished at 1:54 PM
4/10/2012	1:54:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/10/2012	1:54:50 PM	Recipe started at 1:54 PM
4/10/2012	1:54:50 PM	Helium valve closed
4/10/2012	1:54:50 PM	H2 valve closed
4/10/2012	1:54:50 PM	BCl3 valve closed
4/10/2012	1:54:50 PM	PH3 valve closed
4/10/2012	1:54:50 PM	SiCl4 pre valve closed
4/10/2012	1:54:50 PM	SiCl4 post valve closed
4/10/2012	1:54:50 PM	Bypass valve closed
4/10/2012	1:54:50 PM	Bubbler valve closed
4/10/2012	1:54:50 PM	Main Vac valve opened
4/10/2012	1:54:50 PM	Helium MFC set to  0.000000
4/10/2012	1:54:50 PM	H2 MFC set to  0.000000
4/10/2012	1:54:50 PM	BCl3 MFC set to  0.000000
4/10/2012	1:54:50 PM	PH3 MFC set to  0.000000
4/10/2012	1:54:50 PM	SiCl4 MFC set to  0.000000
4/10/2012	1:54:50 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	1:54:50 PM	Tube furnace set to 0
4/10/2012	3:24:50 PM	Helium valve closed
4/10/2012	3:24:50 PM	H2 valve closed
4/10/2012	3:24:50 PM	BCl3 valve closed
4/10/2012	3:24:50 PM	PH3 valve closed
4/10/2012	3:24:50 PM	SiCl4 pre valve closed
4/10/2012	3:24:50 PM	SiCl4 post valve closed
4/10/2012	3:24:50 PM	Main Vac valve closed
4/10/2012	3:24:50 PM	Bypass valve closed
4/10/2012	3:24:50 PM	Bubbler valve closed
4/10/2012	3:24:50 PM	Helium MFC set to  0.000000
4/10/2012	3:24:50 PM	H2 MFC set to  0.000000
4/10/2012	3:24:50 PM	BCl3 MFC set to  0.000000
4/10/2012	3:24:50 PM	PH3 MFC set to  0.000000
4/10/2012	3:24:50 PM	SiCl4 MFC set to  0.000000
4/10/2012	3:24:50 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	3:24:50 PM	Tube furnace set to 0
4/10/2012	3:24:53 PM	Helium valve closed
4/10/2012	3:24:53 PM	BCl3 valve closed
4/10/2012	3:24:53 PM	PH3 valve closed
4/10/2012	3:24:53 PM	SiCl4 pre valve closed
4/10/2012	3:24:53 PM	SiCl4 post valve closed
4/10/2012	3:24:53 PM	Main Vac valve closed
4/10/2012	3:24:53 PM	Bypass valve closed
4/10/2012	3:24:53 PM	Bubbler valve closed
4/10/2012	3:24:53 PM	H2 valve opened
4/10/2012	3:24:53 PM	Helium MFC set to  0.000000
4/10/2012	3:24:53 PM	H2 MFC set to  500.000000
4/10/2012	3:24:53 PM	BCl3 MFC set to  0.000000
4/10/2012	3:24:53 PM	PH3 MFC set to  0.000000
4/10/2012	3:24:53 PM	SiCl4 MFC set to  0.000000
4/10/2012	3:24:53 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	3:24:53 PM	Tube furnace set to 0
4/10/2012	3:25:58 PM	Helium valve closed
4/10/2012	3:25:58 PM	BCl3 valve closed
4/10/2012	3:25:58 PM	PH3 valve closed
4/10/2012	3:25:58 PM	SiCl4 pre valve closed
4/10/2012	3:25:58 PM	SiCl4 post valve closed
4/10/2012	3:25:58 PM	Main Vac valve closed
4/10/2012	3:25:58 PM	Bypass valve closed
4/10/2012	3:25:58 PM	H2 valve opened
4/10/2012	3:25:58 PM	Bubbler valve opened
4/10/2012	3:25:58 PM	Helium MFC set to  0.000000
4/10/2012	3:25:58 PM	H2 MFC set to  500.000000
4/10/2012	3:25:58 PM	BCl3 MFC set to  0.000000
4/10/2012	3:25:59 PM	PH3 MFC set to  0.000000
4/10/2012	3:25:59 PM	SiCl4 MFC set to  0.000000
4/10/2012	3:25:59 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	3:25:59 PM	Tube furnace set to 0
4/10/2012	3:26:00 PM	Helium valve closed
4/10/2012	3:26:00 PM	BCl3 valve closed
4/10/2012	3:26:00 PM	PH3 valve closed
4/10/2012	3:26:00 PM	SiCl4 pre valve closed
4/10/2012	3:26:00 PM	SiCl4 post valve closed
4/10/2012	3:26:00 PM	Main Vac valve closed
4/10/2012	3:26:00 PM	Bypass valve closed
4/10/2012	3:26:00 PM	H2 valve opened
4/10/2012	3:26:00 PM	Bubbler valve opened
4/10/2012	3:26:00 PM	Helium MFC set to  0.000000
4/10/2012	3:26:00 PM	H2 MFC set to  500.000000
4/10/2012	3:26:00 PM	BCl3 MFC set to  0.000000
4/10/2012	3:26:00 PM	PH3 MFC set to  0.000000
4/10/2012	3:26:00 PM	SiCl4 MFC set to  0.000000
4/10/2012	3:26:00 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	3:26:00 PM	Tube furnace set to 1000
4/10/2012	3:51:00 PM	Helium valve closed
4/10/2012	3:51:00 PM	PH3 valve closed
4/10/2012	3:51:00 PM	Main Vac valve closed
4/10/2012	3:51:00 PM	Bypass valve closed
4/10/2012	3:51:00 PM	H2 valve opened
4/10/2012	3:51:00 PM	BCl3 valve opened
4/10/2012	3:51:00 PM	SiCl4 pre valve opened
4/10/2012	3:51:00 PM	SiCl4 post valve opened
4/10/2012	3:51:00 PM	Bubbler valve opened
4/10/2012	3:51:00 PM	Helium MFC set to  0.000000
4/10/2012	3:51:00 PM	H2 MFC set to  450.000000
4/10/2012	3:51:00 PM	BCl3 MFC set to  1.000000
4/10/2012	3:51:00 PM	PH3 MFC set to  0.000000
4/10/2012	3:51:00 PM	SiCl4 MFC set to  50.000000
4/10/2012	3:51:00 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	3:51:00 PM	Tube furnace set to 1000
4/10/2012	4:12:00 PM	Helium valve closed
4/10/2012	4:12:00 PM	BCl3 valve closed
4/10/2012	4:12:00 PM	PH3 valve closed
4/10/2012	4:12:00 PM	SiCl4 pre valve closed
4/10/2012	4:12:00 PM	SiCl4 post valve closed
4/10/2012	4:12:00 PM	Main Vac valve closed
4/10/2012	4:12:00 PM	Bypass valve closed
4/10/2012	4:12:00 PM	H2 valve opened
4/10/2012	4:12:00 PM	Bubbler valve opened
4/10/2012	4:12:00 PM	Helium MFC set to  0.000000
4/10/2012	4:12:00 PM	H2 MFC set to  500.000000
4/10/2012	4:12:00 PM	BCl3 MFC set to  0.000000
4/10/2012	4:12:00 PM	PH3 MFC set to  0.000000
4/10/2012	4:12:00 PM	SiCl4 MFC set to  0.000000
4/10/2012	4:12:00 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	4:12:00 PM	Tube furnace set to 750
4/10/2012	4:27:00 PM	H2 valve closed
4/10/2012	4:27:00 PM	BCl3 valve closed
4/10/2012	4:27:00 PM	PH3 valve closed
4/10/2012	4:27:00 PM	SiCl4 pre valve closed
4/10/2012	4:27:00 PM	SiCl4 post valve closed
4/10/2012	4:27:00 PM	Main Vac valve closed
4/10/2012	4:27:00 PM	Bypass valve closed
4/10/2012	4:27:00 PM	Helium valve opened
4/10/2012	4:27:00 PM	Bubbler valve opened
4/10/2012	4:27:00 PM	Helium MFC set to  500.000000
4/10/2012	4:27:00 PM	H2 MFC set to  0.000000
4/10/2012	4:27:00 PM	BCl3 MFC set to  0.000000
4/10/2012	4:27:00 PM	PH3 MFC set to  0.000000
4/10/2012	4:27:00 PM	SiCl4 MFC set to  0.000000
4/10/2012	4:27:00 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	4:27:00 PM	Tube furnace set to 0
4/10/2012	4:47:00 PM	Helium valve closed
4/10/2012	4:47:00 PM	H2 valve closed
4/10/2012	4:47:00 PM	BCl3 valve closed
4/10/2012	4:47:00 PM	PH3 valve closed
4/10/2012	4:47:00 PM	SiCl4 pre valve closed
4/10/2012	4:47:00 PM	SiCl4 post valve closed
4/10/2012	4:47:00 PM	Main Vac valve closed
4/10/2012	4:47:00 PM	Bypass valve closed
4/10/2012	4:47:00 PM	Bubbler valve closed
4/10/2012	4:47:00 PM	Helium MFC set to  0.000000
4/10/2012	4:47:00 PM	H2 MFC set to  0.000000
4/10/2012	4:47:00 PM	BCl3 MFC set to  0.000000
4/10/2012	4:47:00 PM	PH3 MFC set to  0.000000
4/10/2012	4:47:00 PM	SiCl4 MFC set to  0.000000
4/10/2012	4:47:00 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	4:47:01 PM	Tube furnace set to 0
4/10/2012	5:07:01 PM	Helium valve closed
4/10/2012	5:07:01 PM	H2 valve closed
4/10/2012	5:07:01 PM	BCl3 valve closed
4/10/2012	5:07:01 PM	PH3 valve closed
4/10/2012	5:07:01 PM	SiCl4 pre valve closed
4/10/2012	5:07:01 PM	SiCl4 post valve closed
4/10/2012	5:07:01 PM	Main Vac valve closed
4/10/2012	5:07:01 PM	Bubbler valve closed
4/10/2012	5:07:01 PM	Bypass valve opened
4/10/2012	5:07:01 PM	Helium MFC set to  0.000000
4/10/2012	5:07:01 PM	H2 MFC set to  0.000000
4/10/2012	5:07:01 PM	BCl3 MFC set to  0.000000
4/10/2012	5:07:01 PM	PH3 MFC set to  0.000000
4/10/2012	5:07:01 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:07:01 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	5:07:01 PM	Tube furnace set to 0
4/10/2012	5:07:47 PM	Helium valve closed
4/10/2012	5:07:47 PM	H2 valve closed
4/10/2012	5:07:47 PM	BCl3 valve closed
4/10/2012	5:07:47 PM	PH3 valve closed
4/10/2012	5:07:47 PM	SiCl4 pre valve closed
4/10/2012	5:07:47 PM	SiCl4 post valve closed
4/10/2012	5:07:47 PM	Main Vac valve closed
4/10/2012	5:07:47 PM	Bubbler valve closed
4/10/2012	5:07:47 PM	Bypass valve opened
4/10/2012	5:07:47 PM	Helium MFC set to  0.000000
4/10/2012	5:07:47 PM	H2 MFC set to  0.000000
4/10/2012	5:07:47 PM	BCl3 MFC set to  0.000000
4/10/2012	5:07:47 PM	PH3 MFC set to  0.000000
4/10/2012	5:07:47 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:07:47 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	5:07:47 PM	Tube furnace set to 0
4/10/2012	5:08:47 PM	Helium valve closed
4/10/2012	5:08:47 PM	H2 valve closed
4/10/2012	5:08:47 PM	BCl3 valve closed
4/10/2012	5:08:47 PM	PH3 valve closed
4/10/2012	5:08:47 PM	SiCl4 pre valve closed
4/10/2012	5:08:47 PM	SiCl4 post valve closed
4/10/2012	5:08:47 PM	Bypass valve closed
4/10/2012	5:08:47 PM	Bubbler valve closed
4/10/2012	5:08:47 PM	Main Vac valve opened
4/10/2012	5:08:47 PM	Helium MFC set to  0.000000
4/10/2012	5:08:47 PM	H2 MFC set to  0.000000
4/10/2012	5:08:47 PM	BCl3 MFC set to  0.000000
4/10/2012	5:08:47 PM	PH3 MFC set to  0.000000
4/10/2012	5:08:47 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:08:47 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	5:08:47 PM	Tube furnace set to 0
4/10/2012	5:34:56 PM	Run aborted at 5:34 PM
4/10/2012	5:34:56 PM	Helium valve closed
4/10/2012	5:34:56 PM	H2 valve closed
4/10/2012	5:34:56 PM	BCl3 valve closed
4/10/2012	5:34:56 PM	PH3 valve closed
4/10/2012	5:34:56 PM	SiCl4 pre valve closed
4/10/2012	5:34:56 PM	SiCl4 post valve closed
4/10/2012	5:34:56 PM	Bypass valve closed
4/10/2012	5:34:56 PM	Main Vac valve closed
4/10/2012	5:34:56 PM	Bubbler valve closed
4/10/2012	5:34:56 PM	Helium MFC set to  0.000000
4/10/2012	5:34:56 PM	H2 MFC set to  0.000000
4/10/2012	5:34:56 PM	BCl3 MFC set to  0.000000
4/10/2012	5:34:56 PM	PH3 MFC set to  0.000000
4/10/2012	5:34:56 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:34:56 PM	Tube furnace set to 0
4/10/2012	5:34:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	5:34:59 PM	Recipe started at 5:34 PM
4/10/2012	5:34:59 PM	Helium valve closed
4/10/2012	5:34:59 PM	H2 valve closed
4/10/2012	5:34:59 PM	BCl3 valve closed
4/10/2012	5:34:59 PM	PH3 valve closed
4/10/2012	5:34:59 PM	SiCl4 pre valve closed
4/10/2012	5:34:59 PM	SiCl4 post valve closed
4/10/2012	5:34:59 PM	Main Vac valve closed
4/10/2012	5:34:59 PM	Bypass valve closed
4/10/2012	5:34:59 PM	Bubbler valve closed
4/10/2012	5:34:59 PM	Helium MFC set to  0.000000
4/10/2012	5:34:59 PM	H2 MFC set to  0.000000
4/10/2012	5:34:59 PM	BCl3 MFC set to  0.000000
4/10/2012	5:34:59 PM	PH3 MFC set to  0.000000
4/10/2012	5:34:59 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:34:59 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	5:34:59 PM	Tube furnace set to 0
4/10/2012	5:35:02 PM	H2 valve closed
4/10/2012	5:35:02 PM	BCl3 valve closed
4/10/2012	5:35:02 PM	PH3 valve closed
4/10/2012	5:35:02 PM	SiCl4 pre valve closed
4/10/2012	5:35:02 PM	SiCl4 post valve closed
4/10/2012	5:35:02 PM	Main Vac valve closed
4/10/2012	5:35:02 PM	Bypass valve closed
4/10/2012	5:35:02 PM	Bubbler valve closed
4/10/2012	5:35:02 PM	Helium valve opened
4/10/2012	5:35:02 PM	Helium MFC set to  500.000000
4/10/2012	5:35:02 PM	H2 MFC set to  0.000000
4/10/2012	5:35:02 PM	BCl3 MFC set to  0.000000
4/10/2012	5:35:02 PM	PH3 MFC set to  0.000000
4/10/2012	5:35:02 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:35:02 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	5:35:02 PM	Tube furnace set to 0
4/10/2012	5:36:06 PM	Helium valve closed
4/10/2012	5:36:06 PM	H2 valve closed
4/10/2012	5:36:06 PM	BCl3 valve closed
4/10/2012	5:36:06 PM	PH3 valve closed
4/10/2012	5:36:06 PM	SiCl4 pre valve closed
4/10/2012	5:36:06 PM	SiCl4 post valve closed
4/10/2012	5:36:06 PM	Main Vac valve closed
4/10/2012	5:36:06 PM	Bypass valve closed
4/10/2012	5:36:06 PM	Bubbler valve closed
4/10/2012	5:36:06 PM	Helium MFC set to  0.000000
4/10/2012	5:36:06 PM	H2 MFC set to  0.000000
4/10/2012	5:36:06 PM	BCl3 MFC set to  0.000000
4/10/2012	5:36:06 PM	PH3 MFC set to  0.000000
4/10/2012	5:36:06 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:36:06 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	5:36:06 PM	Tube furnace set to 0
4/10/2012	5:36:07 PM	Run finished at 5:36 PM
4/10/2012	5:36:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	5:47:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	5:47:25 PM	Recipe started at 5:47 PM
4/10/2012	5:47:25 PM	Helium valve closed
4/10/2012	5:47:25 PM	H2 valve closed
4/10/2012	5:47:25 PM	BCl3 valve closed
4/10/2012	5:47:25 PM	PH3 valve closed
4/10/2012	5:47:25 PM	SiCl4 pre valve closed
4/10/2012	5:47:25 PM	SiCl4 post valve closed
4/10/2012	5:47:25 PM	Main Vac valve closed
4/10/2012	5:47:25 PM	Bypass valve closed
4/10/2012	5:47:25 PM	Bubbler valve closed
4/10/2012	5:47:25 PM	Helium MFC set to  0.000000
4/10/2012	5:47:25 PM	H2 MFC set to  0.000000
4/10/2012	5:47:25 PM	BCl3 MFC set to  0.000000
4/10/2012	5:47:25 PM	PH3 MFC set to  0.000000
4/10/2012	5:47:25 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:47:25 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	5:47:25 PM	Tube furnace set to 0
4/10/2012	5:47:28 PM	H2 valve closed
4/10/2012	5:47:28 PM	BCl3 valve closed
4/10/2012	5:47:28 PM	PH3 valve closed
4/10/2012	5:47:28 PM	SiCl4 pre valve closed
4/10/2012	5:47:28 PM	SiCl4 post valve closed
4/10/2012	5:47:28 PM	Main Vac valve closed
4/10/2012	5:47:28 PM	Bypass valve closed
4/10/2012	5:47:28 PM	Bubbler valve closed
4/10/2012	5:47:28 PM	Helium valve opened
4/10/2012	5:47:28 PM	Helium MFC set to  500.000000
4/10/2012	5:47:28 PM	H2 MFC set to  0.000000
4/10/2012	5:47:28 PM	BCl3 MFC set to  0.000000
4/10/2012	5:47:28 PM	PH3 MFC set to  0.000000
4/10/2012	5:47:28 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:47:28 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	5:47:28 PM	Tube furnace set to 0
4/10/2012	5:47:29 PM	Helium valve closed
4/10/2012	5:47:29 PM	H2 valve closed
4/10/2012	5:47:29 PM	BCl3 valve closed
4/10/2012	5:47:29 PM	PH3 valve closed
4/10/2012	5:47:29 PM	SiCl4 pre valve closed
4/10/2012	5:47:29 PM	SiCl4 post valve closed
4/10/2012	5:47:29 PM	Main Vac valve closed
4/10/2012	5:47:29 PM	Bypass valve closed
4/10/2012	5:47:29 PM	Bubbler valve closed
4/10/2012	5:47:29 PM	Helium MFC set to  0.000000
4/10/2012	5:47:29 PM	H2 MFC set to  0.000000
4/10/2012	5:47:29 PM	BCl3 MFC set to  0.000000
4/10/2012	5:47:29 PM	PH3 MFC set to  0.000000
4/10/2012	5:47:29 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:47:29 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	5:47:29 PM	Tube furnace set to 0
4/10/2012	5:47:30 PM	Run finished at 5:47 PM
4/10/2012	5:47:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	5:51:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/10/2012	5:51:39 PM	Recipe started at 5:51 PM
4/10/2012	5:51:39 PM	Helium valve closed
4/10/2012	5:51:39 PM	H2 valve closed
4/10/2012	5:51:39 PM	BCl3 valve closed
4/10/2012	5:51:39 PM	PH3 valve closed
4/10/2012	5:51:39 PM	SiCl4 pre valve closed
4/10/2012	5:51:39 PM	SiCl4 post valve closed
4/10/2012	5:51:39 PM	Main Vac valve closed
4/10/2012	5:51:39 PM	Bubbler valve closed
4/10/2012	5:51:39 PM	Bypass valve opened
4/10/2012	5:51:39 PM	Helium MFC set to  0.000000
4/10/2012	5:51:39 PM	H2 MFC set to  0.000000
4/10/2012	5:51:39 PM	BCl3 MFC set to  0.000000
4/10/2012	5:51:39 PM	PH3 MFC set to  0.000000
4/10/2012	5:51:39 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:51:39 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	5:51:40 PM	Tube furnace set to 0
4/10/2012	5:52:42 PM	Helium valve closed
4/10/2012	5:52:42 PM	H2 valve closed
4/10/2012	5:52:42 PM	BCl3 valve closed
4/10/2012	5:52:42 PM	PH3 valve closed
4/10/2012	5:52:42 PM	SiCl4 pre valve closed
4/10/2012	5:52:42 PM	SiCl4 post valve closed
4/10/2012	5:52:42 PM	Main Vac valve closed
4/10/2012	5:52:42 PM	Bubbler valve closed
4/10/2012	5:52:42 PM	Bypass valve opened
4/10/2012	5:52:42 PM	Helium MFC set to  0.000000
4/10/2012	5:52:42 PM	H2 MFC set to  0.000000
4/10/2012	5:52:42 PM	BCl3 MFC set to  0.000000
4/10/2012	5:52:42 PM	PH3 MFC set to  0.000000
4/10/2012	5:52:42 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:52:42 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	5:52:43 PM	Tube furnace set to 0
4/10/2012	5:53:43 PM	Helium valve closed
4/10/2012	5:53:43 PM	H2 valve closed
4/10/2012	5:53:43 PM	BCl3 valve closed
4/10/2012	5:53:43 PM	PH3 valve closed
4/10/2012	5:53:43 PM	SiCl4 pre valve closed
4/10/2012	5:53:43 PM	SiCl4 post valve closed
4/10/2012	5:53:43 PM	Bypass valve closed
4/10/2012	5:53:43 PM	Bubbler valve closed
4/10/2012	5:53:43 PM	Main Vac valve opened
4/10/2012	5:53:43 PM	Helium MFC set to  0.000000
4/10/2012	5:53:43 PM	H2 MFC set to  0.000000
4/10/2012	5:53:43 PM	BCl3 MFC set to  0.000000
4/10/2012	5:53:43 PM	PH3 MFC set to  0.000000
4/10/2012	5:53:43 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:53:43 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	5:53:43 PM	Tube furnace set to 0
4/10/2012	5:53:44 PM	Run finished at 5:53 PM
4/10/2012	5:53:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/10/2012	5:55:07 PM	Recipe started at 5:55 PM
4/10/2012	5:55:07 PM	Helium valve closed
4/10/2012	5:55:07 PM	H2 valve closed
4/10/2012	5:55:07 PM	BCl3 valve closed
4/10/2012	5:55:07 PM	PH3 valve closed
4/10/2012	5:55:07 PM	SiCl4 pre valve closed
4/10/2012	5:55:07 PM	SiCl4 post valve closed
4/10/2012	5:55:07 PM	Bypass valve closed
4/10/2012	5:55:07 PM	Bubbler valve closed
4/10/2012	5:55:07 PM	Main Vac valve opened
4/10/2012	5:55:07 PM	Helium MFC set to  0.000000
4/10/2012	5:55:07 PM	H2 MFC set to  0.000000
4/10/2012	5:55:07 PM	BCl3 MFC set to  0.000000
4/10/2012	5:55:07 PM	PH3 MFC set to  0.000000
4/10/2012	5:55:07 PM	SiCl4 MFC set to  0.000000
4/10/2012	5:55:07 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	5:55:07 PM	Tube furnace set to 0
4/10/2012	7:25:07 PM	Helium valve closed
4/10/2012	7:25:07 PM	H2 valve closed
4/10/2012	7:25:07 PM	BCl3 valve closed
4/10/2012	7:25:07 PM	PH3 valve closed
4/10/2012	7:25:07 PM	SiCl4 pre valve closed
4/10/2012	7:25:07 PM	SiCl4 post valve closed
4/10/2012	7:25:07 PM	Main Vac valve closed
4/10/2012	7:25:07 PM	Bypass valve closed
4/10/2012	7:25:07 PM	Bubbler valve closed
4/10/2012	7:25:07 PM	Helium MFC set to  0.000000
4/10/2012	7:25:07 PM	H2 MFC set to  0.000000
4/10/2012	7:25:07 PM	BCl3 MFC set to  0.000000
4/10/2012	7:25:07 PM	PH3 MFC set to  0.000000
4/10/2012	7:25:07 PM	SiCl4 MFC set to  0.000000
4/10/2012	7:25:07 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	7:25:07 PM	Tube furnace set to 0
4/10/2012	7:25:10 PM	Helium valve closed
4/10/2012	7:25:10 PM	BCl3 valve closed
4/10/2012	7:25:10 PM	PH3 valve closed
4/10/2012	7:25:10 PM	SiCl4 pre valve closed
4/10/2012	7:25:10 PM	SiCl4 post valve closed
4/10/2012	7:25:10 PM	Main Vac valve closed
4/10/2012	7:25:10 PM	Bypass valve closed
4/10/2012	7:25:10 PM	Bubbler valve closed
4/10/2012	7:25:10 PM	H2 valve opened
4/10/2012	7:25:10 PM	Helium MFC set to  0.000000
4/10/2012	7:25:10 PM	H2 MFC set to  500.000000
4/10/2012	7:25:10 PM	BCl3 MFC set to  0.000000
4/10/2012	7:25:10 PM	PH3 MFC set to  0.000000
4/10/2012	7:25:10 PM	SiCl4 MFC set to  0.000000
4/10/2012	7:25:10 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	7:25:10 PM	Tube furnace set to 0
4/10/2012	7:26:17 PM	Helium valve closed
4/10/2012	7:26:17 PM	BCl3 valve closed
4/10/2012	7:26:17 PM	PH3 valve closed
4/10/2012	7:26:17 PM	SiCl4 pre valve closed
4/10/2012	7:26:17 PM	SiCl4 post valve closed
4/10/2012	7:26:17 PM	Main Vac valve closed
4/10/2012	7:26:17 PM	Bypass valve closed
4/10/2012	7:26:17 PM	H2 valve opened
4/10/2012	7:26:17 PM	Bubbler valve opened
4/10/2012	7:26:17 PM	Helium MFC set to  0.000000
4/10/2012	7:26:17 PM	H2 MFC set to  500.000000
4/10/2012	7:26:17 PM	BCl3 MFC set to  0.000000
4/10/2012	7:26:17 PM	PH3 MFC set to  0.000000
4/10/2012	7:26:17 PM	SiCl4 MFC set to  0.000000
4/10/2012	7:26:17 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	7:26:18 PM	Tube furnace set to 0
4/10/2012	7:26:19 PM	Helium valve closed
4/10/2012	7:26:19 PM	BCl3 valve closed
4/10/2012	7:26:19 PM	PH3 valve closed
4/10/2012	7:26:19 PM	SiCl4 pre valve closed
4/10/2012	7:26:19 PM	SiCl4 post valve closed
4/10/2012	7:26:19 PM	Main Vac valve closed
4/10/2012	7:26:19 PM	Bypass valve closed
4/10/2012	7:26:19 PM	H2 valve opened
4/10/2012	7:26:19 PM	Bubbler valve opened
4/10/2012	7:26:19 PM	Helium MFC set to  0.000000
4/10/2012	7:26:19 PM	H2 MFC set to  500.000000
4/10/2012	7:26:19 PM	BCl3 MFC set to  0.000000
4/10/2012	7:26:19 PM	PH3 MFC set to  0.000000
4/10/2012	7:26:19 PM	SiCl4 MFC set to  0.000000
4/10/2012	7:26:19 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	7:26:19 PM	Tube furnace set to 1000
4/10/2012	7:51:19 PM	Helium valve closed
4/10/2012	7:51:19 PM	PH3 valve closed
4/10/2012	7:51:19 PM	Main Vac valve closed
4/10/2012	7:51:19 PM	Bypass valve closed
4/10/2012	7:51:19 PM	H2 valve opened
4/10/2012	7:51:19 PM	BCl3 valve opened
4/10/2012	7:51:19 PM	SiCl4 pre valve opened
4/10/2012	7:51:19 PM	SiCl4 post valve opened
4/10/2012	7:51:19 PM	Bubbler valve opened
4/10/2012	7:51:19 PM	Helium MFC set to  0.000000
4/10/2012	7:51:19 PM	H2 MFC set to  450.000000
4/10/2012	7:51:19 PM	BCl3 MFC set to  1.000000
4/10/2012	7:51:19 PM	PH3 MFC set to  0.000000
4/10/2012	7:51:19 PM	SiCl4 MFC set to  50.000000
4/10/2012	7:51:19 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	7:51:19 PM	Tube furnace set to 1000
4/10/2012	8:20:19 PM	Helium valve closed
4/10/2012	8:20:19 PM	BCl3 valve closed
4/10/2012	8:20:19 PM	PH3 valve closed
4/10/2012	8:20:19 PM	SiCl4 pre valve closed
4/10/2012	8:20:19 PM	SiCl4 post valve closed
4/10/2012	8:20:19 PM	Main Vac valve closed
4/10/2012	8:20:19 PM	Bypass valve closed
4/10/2012	8:20:19 PM	H2 valve opened
4/10/2012	8:20:19 PM	Bubbler valve opened
4/10/2012	8:20:19 PM	Helium MFC set to  0.000000
4/10/2012	8:20:19 PM	H2 MFC set to  500.000000
4/10/2012	8:20:19 PM	BCl3 MFC set to  0.000000
4/10/2012	8:20:19 PM	PH3 MFC set to  0.000000
4/10/2012	8:20:19 PM	SiCl4 MFC set to  0.000000
4/10/2012	8:20:19 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	8:20:19 PM	Tube furnace set to 750
4/10/2012	8:35:19 PM	H2 valve closed
4/10/2012	8:35:19 PM	BCl3 valve closed
4/10/2012	8:35:19 PM	PH3 valve closed
4/10/2012	8:35:19 PM	SiCl4 pre valve closed
4/10/2012	8:35:19 PM	SiCl4 post valve closed
4/10/2012	8:35:19 PM	Main Vac valve closed
4/10/2012	8:35:19 PM	Bypass valve closed
4/10/2012	8:35:19 PM	Helium valve opened
4/10/2012	8:35:19 PM	Bubbler valve opened
4/10/2012	8:35:19 PM	Helium MFC set to  500.000000
4/10/2012	8:35:19 PM	H2 MFC set to  0.000000
4/10/2012	8:35:19 PM	BCl3 MFC set to  0.000000
4/10/2012	8:35:19 PM	PH3 MFC set to  0.000000
4/10/2012	8:35:19 PM	SiCl4 MFC set to  0.000000
4/10/2012	8:35:19 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	8:35:19 PM	Tube furnace set to 0
4/10/2012	8:55:19 PM	Helium valve closed
4/10/2012	8:55:19 PM	H2 valve closed
4/10/2012	8:55:19 PM	BCl3 valve closed
4/10/2012	8:55:19 PM	PH3 valve closed
4/10/2012	8:55:19 PM	SiCl4 pre valve closed
4/10/2012	8:55:19 PM	SiCl4 post valve closed
4/10/2012	8:55:19 PM	Main Vac valve closed
4/10/2012	8:55:19 PM	Bypass valve closed
4/10/2012	8:55:19 PM	Bubbler valve closed
4/10/2012	8:55:19 PM	Helium MFC set to  0.000000
4/10/2012	8:55:19 PM	H2 MFC set to  0.000000
4/10/2012	8:55:19 PM	BCl3 MFC set to  0.000000
4/10/2012	8:55:19 PM	PH3 MFC set to  0.000000
4/10/2012	8:55:19 PM	SiCl4 MFC set to  0.000000
4/10/2012	8:55:19 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	8:55:20 PM	Tube furnace set to 0
4/10/2012	9:15:20 PM	Helium valve closed
4/10/2012	9:15:20 PM	H2 valve closed
4/10/2012	9:15:20 PM	BCl3 valve closed
4/10/2012	9:15:20 PM	PH3 valve closed
4/10/2012	9:15:20 PM	SiCl4 pre valve closed
4/10/2012	9:15:20 PM	SiCl4 post valve closed
4/10/2012	9:15:20 PM	Main Vac valve closed
4/10/2012	9:15:20 PM	Bubbler valve closed
4/10/2012	9:15:20 PM	Bypass valve opened
4/10/2012	9:15:20 PM	Helium MFC set to  0.000000
4/10/2012	9:15:20 PM	H2 MFC set to  0.000000
4/10/2012	9:15:20 PM	BCl3 MFC set to  0.000000
4/10/2012	9:15:20 PM	PH3 MFC set to  0.000000
4/10/2012	9:15:20 PM	SiCl4 MFC set to  0.000000
4/10/2012	9:15:20 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	9:15:20 PM	Tube furnace set to 0
4/10/2012	9:16:07 PM	Helium valve closed
4/10/2012	9:16:07 PM	H2 valve closed
4/10/2012	9:16:07 PM	BCl3 valve closed
4/10/2012	9:16:07 PM	PH3 valve closed
4/10/2012	9:16:07 PM	SiCl4 pre valve closed
4/10/2012	9:16:07 PM	SiCl4 post valve closed
4/10/2012	9:16:07 PM	Main Vac valve closed
4/10/2012	9:16:07 PM	Bubbler valve closed
4/10/2012	9:16:07 PM	Bypass valve opened
4/10/2012	9:16:07 PM	Helium MFC set to  0.000000
4/10/2012	9:16:07 PM	H2 MFC set to  0.000000
4/10/2012	9:16:07 PM	BCl3 MFC set to  0.000000
4/10/2012	9:16:07 PM	PH3 MFC set to  0.000000
4/10/2012	9:16:07 PM	SiCl4 MFC set to  0.000000
4/10/2012	9:16:07 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	9:16:07 PM	Tube furnace set to 0
4/10/2012	9:17:07 PM	Helium valve closed
4/10/2012	9:17:07 PM	H2 valve closed
4/10/2012	9:17:07 PM	BCl3 valve closed
4/10/2012	9:17:07 PM	PH3 valve closed
4/10/2012	9:17:07 PM	SiCl4 pre valve closed
4/10/2012	9:17:07 PM	SiCl4 post valve closed
4/10/2012	9:17:07 PM	Bypass valve closed
4/10/2012	9:17:07 PM	Bubbler valve closed
4/10/2012	9:17:07 PM	Main Vac valve opened
4/10/2012	9:17:07 PM	Helium MFC set to  0.000000
4/10/2012	9:17:07 PM	H2 MFC set to  0.000000
4/10/2012	9:17:07 PM	BCl3 MFC set to  0.000000
4/10/2012	9:17:07 PM	PH3 MFC set to  0.000000
4/10/2012	9:17:07 PM	SiCl4 MFC set to  0.000000
4/10/2012	9:17:07 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	9:17:08 PM	Tube furnace set to 0
4/10/2012	10:01:36 PM	Run aborted at 10:01 PM
4/10/2012	10:01:36 PM	Helium valve closed
4/10/2012	10:01:36 PM	H2 valve closed
4/10/2012	10:01:36 PM	BCl3 valve closed
4/10/2012	10:01:36 PM	PH3 valve closed
4/10/2012	10:01:36 PM	SiCl4 pre valve closed
4/10/2012	10:01:36 PM	SiCl4 post valve closed
4/10/2012	10:01:36 PM	Bypass valve closed
4/10/2012	10:01:36 PM	Main Vac valve closed
4/10/2012	10:01:36 PM	Bubbler valve closed
4/10/2012	10:01:36 PM	Helium MFC set to  0.000000
4/10/2012	10:01:36 PM	H2 MFC set to  0.000000
4/10/2012	10:01:36 PM	BCl3 MFC set to  0.000000
4/10/2012	10:01:36 PM	PH3 MFC set to  0.000000
4/10/2012	10:01:36 PM	SiCl4 MFC set to  0.000000
4/10/2012	10:01:37 PM	Tube furnace set to 0
4/10/2012	10:01:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	10:01:40 PM	Recipe started at 10:01 PM
4/10/2012	10:01:40 PM	Helium valve closed
4/10/2012	10:01:40 PM	H2 valve closed
4/10/2012	10:01:40 PM	BCl3 valve closed
4/10/2012	10:01:40 PM	PH3 valve closed
4/10/2012	10:01:40 PM	SiCl4 pre valve closed
4/10/2012	10:01:40 PM	SiCl4 post valve closed
4/10/2012	10:01:40 PM	Main Vac valve closed
4/10/2012	10:01:40 PM	Bypass valve closed
4/10/2012	10:01:40 PM	Bubbler valve closed
4/10/2012	10:01:40 PM	Helium MFC set to  0.000000
4/10/2012	10:01:40 PM	H2 MFC set to  0.000000
4/10/2012	10:01:40 PM	BCl3 MFC set to  0.000000
4/10/2012	10:01:40 PM	PH3 MFC set to  0.000000
4/10/2012	10:01:40 PM	SiCl4 MFC set to  0.000000
4/10/2012	10:01:40 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:01:40 PM	Tube furnace set to 0
4/10/2012	10:01:43 PM	H2 valve closed
4/10/2012	10:01:43 PM	BCl3 valve closed
4/10/2012	10:01:43 PM	PH3 valve closed
4/10/2012	10:01:43 PM	SiCl4 pre valve closed
4/10/2012	10:01:43 PM	SiCl4 post valve closed
4/10/2012	10:01:43 PM	Main Vac valve closed
4/10/2012	10:01:43 PM	Bypass valve closed
4/10/2012	10:01:43 PM	Bubbler valve closed
4/10/2012	10:01:43 PM	Helium valve opened
4/10/2012	10:01:43 PM	Helium MFC set to  500.000000
4/10/2012	10:01:43 PM	H2 MFC set to  0.000000
4/10/2012	10:01:43 PM	BCl3 MFC set to  0.000000
4/10/2012	10:01:43 PM	PH3 MFC set to  0.000000
4/10/2012	10:01:43 PM	SiCl4 MFC set to  0.000000
4/10/2012	10:01:43 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:01:43 PM	Tube furnace set to 0
4/10/2012	10:02:43 PM	Helium valve closed
4/10/2012	10:02:43 PM	H2 valve closed
4/10/2012	10:02:43 PM	BCl3 valve closed
4/10/2012	10:02:43 PM	PH3 valve closed
4/10/2012	10:02:43 PM	SiCl4 pre valve closed
4/10/2012	10:02:43 PM	SiCl4 post valve closed
4/10/2012	10:02:43 PM	Main Vac valve closed
4/10/2012	10:02:43 PM	Bypass valve closed
4/10/2012	10:02:43 PM	Bubbler valve closed
4/10/2012	10:02:43 PM	Helium MFC set to  0.000000
4/10/2012	10:02:43 PM	H2 MFC set to  0.000000
4/10/2012	10:02:43 PM	BCl3 MFC set to  0.000000
4/10/2012	10:02:43 PM	PH3 MFC set to  0.000000
4/10/2012	10:02:43 PM	SiCl4 MFC set to  0.000000
4/10/2012	10:02:43 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:02:44 PM	Tube furnace set to 0
4/10/2012	10:02:45 PM	Run finished at 10:02 PM
4/10/2012	10:02:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	10:09:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	10:09:15 PM	Recipe started at 10:09 PM
4/10/2012	10:09:15 PM	Helium valve closed
4/10/2012	10:09:15 PM	H2 valve closed
4/10/2012	10:09:15 PM	BCl3 valve closed
4/10/2012	10:09:15 PM	PH3 valve closed
4/10/2012	10:09:15 PM	SiCl4 pre valve closed
4/10/2012	10:09:15 PM	SiCl4 post valve closed
4/10/2012	10:09:15 PM	Main Vac valve closed
4/10/2012	10:09:15 PM	Bypass valve closed
4/10/2012	10:09:15 PM	Bubbler valve closed
4/10/2012	10:09:15 PM	Helium MFC set to  0.000000
4/10/2012	10:09:15 PM	H2 MFC set to  0.000000
4/10/2012	10:09:15 PM	BCl3 MFC set to  0.000000
4/10/2012	10:09:15 PM	PH3 MFC set to  0.000000
4/10/2012	10:09:15 PM	SiCl4 MFC set to  0.000000
4/10/2012	10:09:15 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:09:15 PM	Tube furnace set to 0
4/10/2012	10:09:18 PM	H2 valve closed
4/10/2012	10:09:18 PM	BCl3 valve closed
4/10/2012	10:09:18 PM	PH3 valve closed
4/10/2012	10:09:18 PM	SiCl4 pre valve closed
4/10/2012	10:09:18 PM	SiCl4 post valve closed
4/10/2012	10:09:18 PM	Main Vac valve closed
4/10/2012	10:09:18 PM	Bypass valve closed
4/10/2012	10:09:18 PM	Bubbler valve closed
4/10/2012	10:09:18 PM	Helium valve opened
4/10/2012	10:09:18 PM	Helium MFC set to  500.000000
4/10/2012	10:09:18 PM	H2 MFC set to  0.000000
4/10/2012	10:09:18 PM	BCl3 MFC set to  0.000000
4/10/2012	10:09:18 PM	PH3 MFC set to  0.000000
4/10/2012	10:09:18 PM	SiCl4 MFC set to  0.000000
4/10/2012	10:09:18 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:09:18 PM	Tube furnace set to 0
4/10/2012	10:09:21 PM	Helium valve closed
4/10/2012	10:09:21 PM	H2 valve closed
4/10/2012	10:09:21 PM	BCl3 valve closed
4/10/2012	10:09:21 PM	PH3 valve closed
4/10/2012	10:09:21 PM	SiCl4 pre valve closed
4/10/2012	10:09:21 PM	SiCl4 post valve closed
4/10/2012	10:09:21 PM	Main Vac valve closed
4/10/2012	10:09:21 PM	Bypass valve closed
4/10/2012	10:09:21 PM	Bubbler valve closed
4/10/2012	10:09:21 PM	Helium MFC set to  0.000000
4/10/2012	10:09:21 PM	H2 MFC set to  0.000000
4/10/2012	10:09:21 PM	BCl3 MFC set to  0.000000
4/10/2012	10:09:21 PM	PH3 MFC set to  0.000000
4/10/2012	10:09:21 PM	SiCl4 MFC set to  0.000000
4/10/2012	10:09:21 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:09:21 PM	Tube furnace set to 0
4/10/2012	10:09:22 PM	Run finished at 10:09 PM
4/10/2012	10:09:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/10/2012	10:11:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/10/2012	10:11:55 PM	Recipe started at 10:11 PM
4/10/2012	10:11:55 PM	Helium valve closed
4/10/2012	10:11:55 PM	H2 valve closed
4/10/2012	10:11:55 PM	BCl3 valve closed
4/10/2012	10:11:55 PM	PH3 valve closed
4/10/2012	10:11:55 PM	SiCl4 pre valve closed
4/10/2012	10:11:55 PM	SiCl4 post valve closed
4/10/2012	10:11:55 PM	Main Vac valve closed
4/10/2012	10:11:55 PM	Bubbler valve closed
4/10/2012	10:11:55 PM	Bypass valve opened
4/10/2012	10:11:55 PM	Helium MFC set to  0.000000
4/10/2012	10:11:55 PM	H2 MFC set to  0.000000
4/10/2012	10:11:55 PM	BCl3 MFC set to  0.000000
4/10/2012	10:11:55 PM	PH3 MFC set to  0.000000
4/10/2012	10:11:55 PM	SiCl4 MFC set to  0.000000
4/10/2012	10:11:55 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:11:56 PM	Tube furnace set to 0
4/10/2012	10:12:54 PM	Helium valve closed
4/10/2012	10:12:54 PM	H2 valve closed
4/10/2012	10:12:54 PM	BCl3 valve closed
4/10/2012	10:12:54 PM	PH3 valve closed
4/10/2012	10:12:54 PM	SiCl4 pre valve closed
4/10/2012	10:12:54 PM	SiCl4 post valve closed
4/10/2012	10:12:54 PM	Main Vac valve closed
4/10/2012	10:12:54 PM	Bubbler valve closed
4/10/2012	10:12:54 PM	Bypass valve opened
4/10/2012	10:12:54 PM	Helium MFC set to  0.000000
4/10/2012	10:12:54 PM	H2 MFC set to  0.000000
4/10/2012	10:12:54 PM	BCl3 MFC set to  0.000000
4/10/2012	10:12:54 PM	PH3 MFC set to  0.000000
4/10/2012	10:12:54 PM	SiCl4 MFC set to  0.000000
4/10/2012	10:12:54 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:12:55 PM	Tube furnace set to 0
4/10/2012	10:13:55 PM	Helium valve closed
4/10/2012	10:13:55 PM	H2 valve closed
4/10/2012	10:13:55 PM	BCl3 valve closed
4/10/2012	10:13:55 PM	PH3 valve closed
4/10/2012	10:13:55 PM	SiCl4 pre valve closed
4/10/2012	10:13:55 PM	SiCl4 post valve closed
4/10/2012	10:13:55 PM	Bypass valve closed
4/10/2012	10:13:55 PM	Bubbler valve closed
4/10/2012	10:13:55 PM	Main Vac valve opened
4/10/2012	10:13:55 PM	Helium MFC set to  0.000000
4/10/2012	10:13:55 PM	H2 MFC set to  0.000000
4/10/2012	10:13:55 PM	BCl3 MFC set to  0.000000
4/10/2012	10:13:55 PM	PH3 MFC set to  0.000000
4/10/2012	10:13:55 PM	SiCl4 MFC set to  0.000000
4/10/2012	10:13:55 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:13:55 PM	Tube furnace set to 0
4/10/2012	10:13:56 PM	Run finished at 10:13 PM
4/10/2012	10:13:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/10/2012	10:15:08 PM	Recipe started at 10:15 PM
4/10/2012	10:15:08 PM	Helium valve closed
4/10/2012	10:15:08 PM	H2 valve closed
4/10/2012	10:15:08 PM	BCl3 valve closed
4/10/2012	10:15:08 PM	PH3 valve closed
4/10/2012	10:15:08 PM	SiCl4 pre valve closed
4/10/2012	10:15:08 PM	SiCl4 post valve closed
4/10/2012	10:15:08 PM	Bypass valve closed
4/10/2012	10:15:08 PM	Bubbler valve closed
4/10/2012	10:15:08 PM	Main Vac valve opened
4/10/2012	10:15:08 PM	Helium MFC set to  0.000000
4/10/2012	10:15:08 PM	H2 MFC set to  0.000000
4/10/2012	10:15:08 PM	BCl3 MFC set to  0.000000
4/10/2012	10:15:08 PM	PH3 MFC set to  0.000000
4/10/2012	10:15:08 PM	SiCl4 MFC set to  0.000000
4/10/2012	10:15:08 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	10:15:08 PM	Tube furnace set to 0
4/10/2012	11:45:08 PM	Helium valve closed
4/10/2012	11:45:08 PM	H2 valve closed
4/10/2012	11:45:08 PM	BCl3 valve closed
4/10/2012	11:45:08 PM	PH3 valve closed
4/10/2012	11:45:08 PM	SiCl4 pre valve closed
4/10/2012	11:45:08 PM	SiCl4 post valve closed
4/10/2012	11:45:08 PM	Main Vac valve closed
4/10/2012	11:45:08 PM	Bypass valve closed
4/10/2012	11:45:08 PM	Bubbler valve closed
4/10/2012	11:45:08 PM	Helium MFC set to  0.000000
4/10/2012	11:45:08 PM	H2 MFC set to  0.000000
4/10/2012	11:45:08 PM	BCl3 MFC set to  0.000000
4/10/2012	11:45:08 PM	PH3 MFC set to  0.000000
4/10/2012	11:45:08 PM	SiCl4 MFC set to  0.000000
4/10/2012	11:45:08 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	11:45:08 PM	Tube furnace set to 0
4/10/2012	11:45:11 PM	Helium valve closed
4/10/2012	11:45:11 PM	BCl3 valve closed
4/10/2012	11:45:11 PM	PH3 valve closed
4/10/2012	11:45:11 PM	SiCl4 pre valve closed
4/10/2012	11:45:11 PM	SiCl4 post valve closed
4/10/2012	11:45:11 PM	Main Vac valve closed
4/10/2012	11:45:11 PM	Bypass valve closed
4/10/2012	11:45:11 PM	Bubbler valve closed
4/10/2012	11:45:11 PM	H2 valve opened
4/10/2012	11:45:11 PM	Helium MFC set to  0.000000
4/10/2012	11:45:11 PM	H2 MFC set to  500.000000
4/10/2012	11:45:11 PM	BCl3 MFC set to  0.000000
4/10/2012	11:45:11 PM	PH3 MFC set to  0.000000
4/10/2012	11:45:11 PM	SiCl4 MFC set to  0.000000
4/10/2012	11:45:11 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	11:45:11 PM	Tube furnace set to 0
4/10/2012	11:46:18 PM	Helium valve closed
4/10/2012	11:46:18 PM	BCl3 valve closed
4/10/2012	11:46:18 PM	PH3 valve closed
4/10/2012	11:46:18 PM	SiCl4 pre valve closed
4/10/2012	11:46:18 PM	SiCl4 post valve closed
4/10/2012	11:46:18 PM	Main Vac valve closed
4/10/2012	11:46:18 PM	Bypass valve closed
4/10/2012	11:46:18 PM	H2 valve opened
4/10/2012	11:46:18 PM	Bubbler valve opened
4/10/2012	11:46:18 PM	Helium MFC set to  0.000000
4/10/2012	11:46:18 PM	H2 MFC set to  500.000000
4/10/2012	11:46:18 PM	BCl3 MFC set to  0.000000
4/10/2012	11:46:18 PM	PH3 MFC set to  0.000000
4/10/2012	11:46:18 PM	SiCl4 MFC set to  0.000000
4/10/2012	11:46:18 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	11:46:18 PM	Tube furnace set to 0
4/10/2012	11:46:19 PM	Helium valve closed
4/10/2012	11:46:19 PM	BCl3 valve closed
4/10/2012	11:46:19 PM	PH3 valve closed
4/10/2012	11:46:19 PM	SiCl4 pre valve closed
4/10/2012	11:46:19 PM	SiCl4 post valve closed
4/10/2012	11:46:19 PM	Main Vac valve closed
4/10/2012	11:46:19 PM	Bypass valve closed
4/10/2012	11:46:19 PM	H2 valve opened
4/10/2012	11:46:19 PM	Bubbler valve opened
4/10/2012	11:46:19 PM	Helium MFC set to  0.000000
4/10/2012	11:46:19 PM	H2 MFC set to  500.000000
4/10/2012	11:46:19 PM	BCl3 MFC set to  0.000000
4/10/2012	11:46:19 PM	PH3 MFC set to  0.000000
4/10/2012	11:46:19 PM	SiCl4 MFC set to  0.000000
4/10/2012	11:46:19 PM	Bypass solenoid MFC set to  0.000000
4/10/2012	11:46:19 PM	Tube furnace set to 1000
